Big Diameter Zirconium Sputtering Target Coating
Zirconium is classified on the Periodic Table as a transitional metal. It has a density 6.49g/cc, an melting point of 1,852degC and a vapor pressure 10-4 Torr at 1,987degC. Its silvery-white appearance and corrosion resistance make it a popular choice for the chemical industry. Zirconium is used in superconductive magnets and surgical devices. It can also be used as an alloying agent to steel. Zirconia, its compound, is used as a substitute for diamonds in jewelry. For optical coatings, semiconductors and data storage devices, zirconium and its compounds are evaporated under vacuum.
Product Introduction
Big Diameter Zirconium Sputtering Target Coating is widely used in optical information storage space industry such as thin film deposition, fuel cell, decoration, semiconductor, display, LED and photovoltaic devices, functional coating, glass coating industry such as automotive glass and architectural glass, optical communication, etc.
Material Type:Zirconium
Symbol:Zr
Atomic Weight:91.224
Atomic Number:40
Color/Appearance:Silvery White, Metallic
Thermal Conductivity:22.7 W/m.K
Melting Point (°C):1,852
Coefficient of Thermal Expansion:5.7 x 10-6/K
Theoretical Density (g/cc): 6.49
Z Ratio:0.6
Sputter:DC
Max Power Density (Watts/Square Inch):50*
Type of Bond:Indium, Elastomer
Export Control (ECCN):1C234
Comments:Alloys with W. Films are easy to oxidize.
Shape:Rotarable，Planar，Tubular
Zirconium Sputtering Target Material element：
|
Elements |
Actual |
Spec |
Units |
Elements |
Actual |
Spec |
Units |
Elements |
Actual |
Spec |
Units |
|
Li |
|
|
ppm |
Zn |
＜0.05 |
|
ppm |
Pb |
|
|
ppm |
|
B |
|
|
ppm |
Ga |
|
|
ppm |
Bi |
|
|
ppm |
|
F |
|
|
ppm |
Ge |
|
|
ppm |
Y |
|
|
ppm |
|
Na |
|
|
ppm |
As |
|
|
ppm |
Th |
|
|
ppm |
|
Mg |
|
|
ppm |
Se |
|
|
ppm |
Er |
|
|
ppm |
|
Al |
|
1.1 |
ppm |
Zr |
Matrix |
WT% |
ppm |
Sc |
＜5 |
|
ppm |
|
Si |
|
3.7 |
ppm |
Nb |
＜0.5 |
|
ppm |
Rh |
＜0.01 |
|
ppm |
|
P |
|
0.05 |
ppm |
Mo |
＜0.05 |
|
ppm |
Os |
|
|
ppm |
|
Cl |
|
0.15 |
ppm |
Pd |
＜1 |
|
ppm |
Cd |
＜0.5 |
|
ppm |
|
K |
＜0.5 |
|
ppm |
Ag |
|
1.8 |
ppm |
In |
|
|
|
|
Ca |
＜0.05 |
|
ppm |
Sn |
|
|
ppm |
|
|
|
|
|
Ti |
|
0.51 |
ppm |
Sb |
|
|
ppm |
|
|
|
|
|
V |
|
0.01 |
ppm |
Ba |
＜0.01 |
|
ppm |
|
|
|
|
|
Cr |
|
2.3 |
ppm |
Hf |
|
500 |
ppm |
|
|
|
|
|
Mn |
|
0.08 |
ppm |
Ta |
＜5 |
|
ppm |
C |
|
|
ppm |
|
Fe |
|
33 |
ppm |
W |
＜0.05 |
|
ppm |
S |
＜0.92 |
|
ppm |
|
Co |
|
0.05 |
ppm |
Pt |
|
|
ppm |
O |
|
|
ppm |
|
Ni |
|
0.47 |
ppm |
Au |
|
|
ppm |
N |
|
|
ppm |
|
Cu |
0.2 |
|
ppm |
Hg |
|
|
ppm |
H |
|
|
ppm |
sputtering target production equipment:
shipping &packing:
Customer Feedback.
why choose us:
(1) XUBO offers superior quality Big Diameter Zirconium Sputtering Target Coating that can be used safely for longer periods of time.
(2) Professionals prepare these products in a dust-free environment to make each glass product clear.
(3) These products are not fragile by nature and are heat resistant for safe use in the commercial field for a long time.
(4) Professionals check the premium quality of each product before placing it on the market.
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